Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478410 | Method of forming nitride film with plasma | Toyohiro KAMADA, Noriaki Fukiage | 2016-10-25 |
| 9245741 | Method for forming nitride film using plasma process | — | 2016-01-26 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478410 | Method of forming nitride film with plasma | Toyohiro KAMADA, Noriaki Fukiage | 2016-10-25 |
| 9245741 | Method for forming nitride film using plasma process | — | 2016-01-26 |