Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404180 | Deposition device | Kaoru Yamamoto, Atsushi Gomi, Satoshi Taga | 2016-08-02 |
| 9303788 | Load lock device | Tetsuya Miyashita | 2016-04-05 |
| 9293417 | Method for forming barrier film on wiring line | Hidenori Miyoshi | 2016-03-22 |