Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472404 | Doping method, doping apparatus and method of manufacturing semiconductor device | Hirokazu Ueda, Masahiro Oka, Yasuhiro Sugimoto, Yuuki Kobayashi | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472404 | Doping method, doping apparatus and method of manufacturing semiconductor device | Hirokazu Ueda, Masahiro Oka, Yasuhiro Sugimoto, Yuuki Kobayashi | 2016-10-18 |