Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441791 | Gas supply unit, substrate processing apparatus and supply gas setting method | Kenetsu Mizusawa, Keiki Ito | 2016-09-13 |
| 9354038 | Swept source optical coherence tomography and method for stabilizing phase thereof | Yoshiaki Yasuno, Youngjoo Hong | 2016-05-31 |