KS

Kohichi Satoh

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
Overall (2016): #323,772 of 481,213Top 70%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9390933 Etching method, storage medium and etching apparatus Kensaku Narushima, Motoko NAKAGOMI, Eiichi KOMORI, Taiki Katou 2016-07-12