KS

Kazuo Sawai

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
Overall (2016): #334,017 of 481,213Top 70%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9396911 Determination method, control method, determination apparatus, pattern forming system and program Keisuke Tanaka, Hiroshi Nagahata 2016-07-19