Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406537 | Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method | Yasushi Takeuchi | 2016-08-02 |
| 9368384 | Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor | Daisuke Yamagishi, Masataka Sato, Yasushi Takeuchi | 2016-06-14 |