Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349620 | Apparatus and method for pre-baking substrate upstream of process chamber | Keisuke Kamata, Hiroyuki Sato, Kazunori Furukawahara, Masaei Suwada, Kenkichi Okubo | 2016-05-24 |
| 9340640 | Polyol for polyurethane preparation and polyurethane preparation method using same | Tomohisa Hirano, Koji Kabu | 2016-05-17 |
| 9343350 | Anti-slip end effector for transporting workpiece using van der waals force | — | 2016-05-17 |