HK

Hiroshi Komiya

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
Overall (2016): #381,364 of 481,213Top 80%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9452397 Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method Kazuyoshi Eshima 2016-09-27