HA

Hikaru Akada

TL Tokyo Electron Limited: 2 patents #101 of 758Top 15%
Overall (2016): #138,992 of 481,213Top 30%
2
Patents 2016

Issued Patents 2016

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9389242 Method for obtaining data of substrate processing apparatus and sensor substrate — 2016-07-12
9268739 Data acquisition method in substrate processing apparatus and sensor substrate — 2016-02-23