Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9388496 | Method for depositing a film on a substrate, and film deposition apparatus | Takahito Umehara | 2016-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9388496 | Method for depositing a film on a substrate, and film deposition apparatus | Takahito Umehara | 2016-07-12 |