Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330936 | Method for depositing metal layers on germanium-containing films using metal chloride precursors | Toshio Hasegawa | 2016-05-03 |
| 9257278 | Method for forming TiN and storage medium | Takeshi Yamamoto | 2016-02-09 |