Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9419211 | Etching method and substrate processing apparatus | Eiichi Nishimura, Masato Kushibiki, Nao Koizumi, Takashi Sone | 2016-08-16 |
| 9412618 | Pattern forming method | Shinya Morikita, Eiichi Nishimura | 2016-08-09 |
| 9245764 | Semiconductor device manufacturing method | Eiichi Nishimura, Tadashi Kotsugi, Kenji Adachi | 2016-01-26 |
| 9234083 | Method and apparatus for forming a periodic pattern using a self-assembled block copolymer | Eiichi Nishimura, Satoko Niitsuma | 2016-01-12 |