Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341952 | Substrate treatment method, non-transitory computer storage medium and substrate treatment system | Satoru Shimura | 2016-05-17 |
| 9329483 | Film forming method, non-transitory computer storage medium and film forming apparatus | Satoru Shimura | 2016-05-03 |
| 9280052 | Substrate treatment method, non-transitory computer storage medium and substrate treatment system | Satoru Shimura | 2016-03-08 |