Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446947 | Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure | Raul Enrique Barreto, Kelly Taylor | 2016-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446947 | Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure | Raul Enrique Barreto, Kelly Taylor | 2016-09-20 |