Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324567 | Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials | Martin D. Tabat, Christopher K. Olsen, Yan Shao, Luis Fernandez | 2016-04-26 |