Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337017 | Method for repairing damages to sidewalls of an ultra-low dielectric constant film | Shaohai Zeng, Qingyun Zuo | 2016-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337017 | Method for repairing damages to sidewalls of an ultra-low dielectric constant film | Shaohai Zeng, Qingyun Zuo | 2016-05-10 |