Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449140 | Conflict detection for self-aligned multiple patterning compliance | Chin-Chang Hsu, Ying-Yu Shen, Wen-Ju Yang, Ken-Hsien Hsieh | 2016-09-20 |
| 9360750 | Balancing mask loading | Chin-Chang Hsu, Wen-Ju Yang | 2016-06-07 |