Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355893 | Method for preventing extreme low-K (ELK) dielectric layer from being damaged during plasma process | Yu-Shu Chen, Yu-Cheng Liu | 2016-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355893 | Method for preventing extreme low-K (ELK) dielectric layer from being damaged during plasma process | Yu-Shu Chen, Yu-Cheng Liu | 2016-05-31 |