Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333619 | Adaptive endpoint method for pad life effect on chemical mechanical polishing | Chu-An Lee, Peng-Chung Jangjian | 2016-05-10 |
| 9305851 | Systems and methods for chemical mechanical planarization with fluorescence detection | I-Shuo Liu, Jung-Tsan Tsai, Chien-Ping Lee | 2016-04-05 |