Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490152 | Asymmetrical chamber configuration | Lan-Hai Wang, Si-Wen Liao, Yong-Hung Yang, Jia-Wei Hsu | 2016-11-08 |
| 9324559 | Thin film deposition apparatus with multi chamber design and film deposition methods | Lan-Hai Wang, Si-Wen Liao, Po-Hsiung Leu, Yong-Hung Yang, Chia-Ming Tai | 2016-04-26 |