Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443715 | Method and device for measuring temperature of substrate in vacuum processing apparatus | Yousen Li, David Z. Chen | 2016-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443715 | Method and device for measuring temperature of substrate in vacuum processing apparatus | Yousen Li, David Z. Chen | 2016-09-13 |