Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9354511 | Integrated mask-aware lithography modeling to support off-axis illumination and multi-tone masks | Hongbo Zhang | 2016-05-31 |
| 9348964 | MASK3D model accuracy enhancement for small feature coupling effect | Hongbo Zhang | 2016-05-24 |