Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484186 | Modeling and correcting short-range and long-range effects in E-beam lithography | Hua Song, James P. Shiely | 2016-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484186 | Modeling and correcting short-range and long-range effects in E-beam lithography | Hua Song, James P. Shiely | 2016-11-01 |