Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470436 | Cryogenic refrigeration apparatus and method of controlling cryogenic refrigeration apparatus | Takaaki Matsui | 2016-10-18 |
| 9440165 | Cryopump and method for regenerating the cryopump | — | 2016-09-13 |
| 9404486 | Cryopump, cryopanel structure, and vacuum evacuation method | — | 2016-08-02 |