Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448475 | Photoresist composition, compound and process of producing photoresist pattern | Takahiro Yasue, Koji Ichikawa | 2016-09-20 |
| 9428485 | Salt, photoresist composition and method for producing photoresist pattern | Yuichi Mukai | 2016-08-30 |
| 9291893 | Resist composition and method for producing resist pattern | Satoshi Yamamoto, Koji Ichikawa | 2016-03-22 |
| 9229321 | Salt and photoresist composition comprising the same | Koji Ichikawa, Kaoru Araki | 2016-01-05 |