Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429841 | Resist composition and method for producing resist pattern | Koji Ichikawa, Takashi Hiraoka | 2016-08-30 |
| 9405187 | Salt, acid generator and resist composition | Takashi Hiraoka, Koji Ichikawa | 2016-08-02 |
| 9233945 | Compound, resin and photoresist composition | Koji Ichikawa, Shingo Fujita | 2016-01-12 |