Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305850 | Etching method and etching apparatus of semiconductor wafer | Kazuaki Kozasa | 2016-04-05 |
| 9266213 | Method of polishing one side of wafer and single side polishing apparatus for wafer | — | 2016-02-23 |