Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493874 | Distribution of gas over a semiconductor wafer in batch processing | — | 2016-11-15 |
| 9437470 | Self-aligned trench isolation in integrated circuits | Ching-Huang Lu, Lei Xue, Kenichi Ohtsuka, Simon S. Chan | 2016-09-06 |
| 9252026 | Buried trench isolation in integrated circuits | Lei Xue, Ching-Huang Lu, Simon S. Chan | 2016-02-02 |
| 9252221 | Formation of gate sidewall structure | Scott A. Bell, Chun Chen, Shenging Fang | 2016-02-02 |