Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417633 | System for compensating dynamic and thermal deformity errors of linear motion single-plane gantry stage in real time, stage apparatus, manufacturing thereof, and measuring and inspection equipment | Byoung Gwan Ko, Jong Kyu Seo, Soo Keun Shin, Chul Jung, Yonk Uk Kwon | 2016-08-16 |