Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335625 | Blank masks for extreme ultra violet lithography, methods of fabricating the same, and methods of correcting registration errors thereof | Young Mo Lee | 2016-05-10 |
| 9274411 | Reflection type blank masks, methods of fabricating the same, and methods of fabricating reflection type photo masks using the same | Yong Dae Kim | 2016-03-01 |