LC

Lijun Chen

SM Shanghai Huali Microelectronics: 1 patents #4 of 17Top 25%
📍 Beijing, CA: #315 of 534 inventorsTop 60%
Overall (2016): #316,233 of 481,213Top 70%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9291794 Temperature balancing device of projection objective of lithography machine and method thereof Jun Zhu 2016-03-22