Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9308624 | Apparatus for treating a plate-like member and method of treating the same | Kazumichi Hibino, Yukinori Suzuki, Kazuyoshi Maeda | 2016-04-12 |
| 9230868 | Warp correction device and warp correction method for semiconductor element substrate | Kouichi Inoue, Kazuyoshi Maeda | 2016-01-05 |