Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9403677 | Micro-electromechanical semiconductor component | — | 2016-08-02 |
| 9399572 | Microelectromechanical component and method for testing a microelectromechanical component | Bernd Burchard | 2016-07-26 |