Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372402 | Molecular organometallic resists for EUV | Daniel Freedman, Miles Marnell, Brian J. Cardineau | 2016-06-21 |
| 9274420 | Method of stabilizing fluorine-containing acid amplifier | Shinya Akiba, Ryo Nadano | 2016-03-01 |