Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9327382 | Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method | Junichi Ueno, Kazuya Sato | 2016-05-03 |
| 9266215 | Method of double-side polishing wafer | Kazuya Sato, Yuki Tanaka | 2016-02-23 |