Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425345 | Epitaxial wafer and manufacturing method thereof | Masahiro Sakurada, Izumi Fusegawa | 2016-08-23 |
| 9337013 | Silicon wafer and method for producing the same | Izumi Fusegawa, Susumu Sonokawa, Hisayuki Saito | 2016-05-10 |
| 9260796 | Method for measuring distance between lower end surface of heat insulating member and surface of raw material melt and method for controlling thereof | Masahiko Urano, Susumu Sonokawa | 2016-02-16 |