Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405184 | Pellicle for EUV, and an assembly including the pellicle, and a method for assembling the same | Shoji Akiyama | 2016-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405184 | Pellicle for EUV, and an assembly including the pellicle, and a method for assembling the same | Shoji Akiyama | 2016-08-02 |