Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9296636 | Titania doped quartz glass and making method | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2016-03-29 |
| 9278881 | EUV lithography member, making method, and titania-doped quartz glass | Shigeru Maida, Hisatoshi Otsuka, Tetsuji Ueda | 2016-03-08 |