Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460973 | Surface processing progress monitoring system | Rui Kato, Hiroomi Goto | 2016-10-04 |
| 9228828 | Thickness monitoring device, etching depth monitoring device and thickness monitoring method | Hiroomi Goto, Rui Kato | 2016-01-05 |