Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9334583 | Method of preventing auto-doping during epitaxial layer growth by cleaning the reaction chamber with hydrogen chloride | Chao Zhang, Zhitang Song, Bo Liu, Guanping Wu, Ting Zhang +2 more | 2016-05-10 |