Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269639 | Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device | Rongwei Fan, Feijue Liu, Qiliang Ni, Hunglin Chen | 2016-02-23 |