Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449866 | Methods and systems for using oxidation layers to improve device surface uniformity | Quanbo Li, Xiangguo Meng, Yu Zhang | 2016-09-20 |
| 9390915 | Methods and systems for improved uniformity of SiGe thickness | Quanbo Li, Xiangguo Meng | 2016-07-12 |