Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371223 | MEMS device and fabrication method | Hongmei Xie, Liangliang Guo | 2016-06-21 |
| 9290378 | MEMS capping method | Lushan Jiang, Xiaojun Chen, Liangliang Guo, Junde Ma | 2016-03-22 |