Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406515 | Laser annealing device including tunable mask and method of using the same | — | 2016-08-02 |
| 9348215 | Photolithographic masks and fabrication method thereof | — | 2016-05-24 |
| 9316925 | Methods for monitoring source symmetry of photolithography systems | — | 2016-04-19 |
| 9257287 | Laser annealing device and method | — | 2016-02-09 |