Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472429 | Method for manufacturing semiconductor device | Shingo Eguchi, Atsuhiro Tani, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA | 2016-10-18 |
| 9397126 | Peeling apparatus and manufacturing apparatus of semiconductor device | Shingo Eguchi, Atsuhiro Tani, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA | 2016-07-19 |