Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230826 | Etching method using mixed gas and method for manufacturing semiconductor device | Shinya Sasagawa, Hiroshi Fujiki, Hidekazu Miyairi | 2016-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230826 | Etching method using mixed gas and method for manufacturing semiconductor device | Shinya Sasagawa, Hiroshi Fujiki, Hidekazu Miyairi | 2016-01-05 |