Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382611 | Sputtering target, method for manufacturing sputtering target, and method for forming thin film | Shunpei Yamazaki, Tetsunori Maruyama, Yuki Imoto, Masahiro Watanabe, Mitsuo Mashiyama +3 more | 2016-07-05 |