Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349626 | Buffer units, substrate processing apparatuses, and substrate processing methods | Byung Man Kang, Byung Chul Kang, Donghyuk Jang | 2016-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349626 | Buffer units, substrate processing apparatuses, and substrate processing methods | Byung Man Kang, Byung Chul Kang, Donghyuk Jang | 2016-05-24 |