Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496806 | MEMS device, electronic apparatus, and manufacturing method of MEMS device | — | 2016-11-15 |
| 9360312 | MEMS element, electronic device, altimeter, electronic apparatus, and moving object | Yuji Chino | 2016-06-07 |